Serial cross-sectional SEM images of a 7 nm node Fin FET 1 bit cell (Lg direction) were automatically acquired at 2 nm interval on a FIB-SEM. Autofocusing and astigmatism correction were automatically performed for each section. The Snorkel (semi-in-lens) objective lens enabled understanding of detailed transistor structure such as several tens nm gate structures of PMOS and NMOS. #7nm #FinFET #PMOS #NMOS #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available instruments for this measure
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